Evaporation Materials for R&D, Evochem

Evochem is the one-stop-source for all Thin-Film applications. Our product portfolio covers

– Highly effective sputtering targets

– More than 60 evaporation materials

– PVD-consumables (liners, boats and filaments)

– Monitoring crystals (6MHz Au, 5MHz Au etc.)

EVOCHEM also offers a broad range of pure and ultrapure metals and materials designed to meet the need of research and development across all industries.

Pure and Ultrapure Metals

EVOCHEM provides a wide range of high purity Metals – with purities of up to 99.99999%. These metals come as wires, foils, sheets, powders, rods, pellets and/ or granules. Please provide us with full details on the material, purity, dimensions, any special tolerances and the quantity of the evaporation materials required.

Element / Shape	Plate/Sheet/Rod	Foil	Wire ∅ mm	Custom Part	Pellets	Powder	Ingot	Sputtering Target	Granules	Purities %
Aluminum	Yes	0.02-2.0mm	0.25-2.0	Yes	Yes	Yes	Yes	Yes	Yes	99-99.999
Antimony	No	No	No	No	Yes	Yes	Yes	Yes	Yes	99-99.999
Arsenic	No	No	No	No	Yes	Yes	No	Yes	Yes	99-99.99999
Barium	Rod	No	No	No	Yes	No	No	No	No	99.7
Bismuth	Bar ~250g	0.1-0.5mm	No	No	Yes	Yes	Yes	Yes	Yes	99.99
Boron	Yes	No	No	No	Yes	Yes	No	Yes	No	99.9
Cadmium	Yes	0.125-1.0	Yes	No	No	Yes	No	No	No	99-99.99999
Caesium	No	No	No	No	No	No	Yes	No	No	99-99.95
Calcium	No	No	No	No	No	No	No	Yes	Yes	98.5
Carbon	Yes	No	No	Yes	No	Yes	No	Yes	Yes	50ppm Ash
Cerium	Rod	1.0	1.0	No	No	Yes	Yes	Yes	Yes	99.9
Chromium	Rod	No	No	No	Pieces	Yes	No	Yes	Pieces	99-99.99
Cobalt	Yes	0.125-0.5	0.5-2.0	No	Yes	Yes	Yes	Yes	Pieces	99-99.99
Copper	Yes	0.04-0.2	Yes	Yes	Yes	Yes	Yes	Yes	Yes	Alloys-OHFC
Dysprosium	Rod	0.25-0.5	0.5-1.0	No	No	Yes	No	Yes	Pieces	99-99.99
Erbium	Rod	0.25-0.5	Yes	1.0	No	No	No	Yes	Pieces	99-99.9
Europium	No	No	No	No	Yes	No	No	Yes	Pieces	99-99.9
Gadolinium	Rod	0.25	2.0	No	No	Yes	No	Yes	Yes	99-99.9
Gallium	No	No	No	No	Yes	No	Yes	Yes	Yes	99-99.9
Germanium	No	No	No	No	No	Yes	No	Yes	Pieces	99.99-99.999
Gold	Yes	0.004-1.0	0.04-3.0	Yes	Yes	No	Yes	Yes	Yes	99-99.99
Hafnium	Rod	0.25	0.5-1.0	No	No	Yes	No	Yes	Pieces	99.9
Holmium	No	0.25	1.0	No	No	Yes	No	Yes	Pieces	99.9
Iridium	No	0.05-0.25	0.25-2.0	No	No	Yes	No	Yes	No	99.9
Iron	Rod	0.01-1.0	0.25-1.0	No	Yes	Yea	No	Yes	Pieces	99.9
Lanthanum	Yes	0.25	1.0	No	No	Yes	No	Yes	Pieces	99.9
Lead	Yes	0.125-0.5	1.0-2.0	No	Yes	Yes	No	Yes	Granules	99.99
Lithium	Sheet	No	No	No	No	No	No	No	Granules	99.0
Lutetium	No	0.25	No	No	Yes	Yes	No	Yes	Pieces	99.9
Magnesium	Sheet	0.5	0.5-1.0	No	Yes	Yes	No	Yes	No	98.0-99.8
Manganese	No	No	No	No	Yes	No	No	Yes	Pieces	99.0-99.99
Mercury	No	No	No	No	No	No	No	No	No	–
Molybdenum	Yes	0.004-1.0	0.02-1.0	Yes	Yes	Yes	No	Yes	No	99.95
Neodymium	Rod	0.25-0.5	1.0	No	No	Yes	Yes	Yes	Pieces	99.9
Nickel	Rod	0.125-1.0	0.1-2.0	No	Yes	Yes	No	Yes	No	99.9-99.99
Niobium	Yes	0.025-1.0	0.25-3.0	Yes	Yes	Yes	No	Yes	Granules	99.9
Osmium	No	No	No	No	No	Yes	No	No	No	99.9
Palladium	Rod	0.025-0.8	0.025-1.0	No	No	Yes	No	Yes	Granules	99.95
Phosphorus	No	No	No	No	No	No	No	No	Pieces	99.9
Platinum	Rod	0.02-1.0	0.025-1.0	Yes	Yes	Yes	No	Yes	Granules	99.9-99.95
Potassium	No	No	No	No	No	No	Yes	No	No	99.95
Praseodymium	Rod	0.25	No	No	No	Yes	No	Yes	Pieces	99.9
Rhenium	Rod	0.025-0.2	0.25-1.0	Yes	Yes	Yes	No	Yes	No	99.9
Rhodium	No	0.05-0.25	0.125-1.0	No	No	Yes	No	Yes	Pieces	99.9
Rubidium	No	No	No	No	No	No	Yes	No	No	99.9
Ruthenium	No	No	No	No	No	Yes	No	Yes	Pieces	99.9
Samarium	No	0.127-0.25	3.0	No	No	Yes	No	Yes	Pieces	99.9
Scandium	No	No	No	No	No	Yes	No	Yes	Pieces	99.9-99.99
Selenium	No	No	No	No	No	Yes	No	Yes	Granules	99.999
Silicon	No	No	No	No	No	Yes	No	Yes	Pieces	99.99-99.9999
Silver	Yes	0.025-1.0	0.025-2.0	Yes	Yes	Yes	No	Yes	Granules	99.9-99.995
Sodium	No	No	No	No	No	No	Yes	No	Pieces	99.9
Strontium	No	No	No	No	No	No	No	No	Pieces	99.0-99.9
Sulphur	No	No	No	No	No	No	No	No	Pieces	99.999
Tantalum	Yes	0.02-1.0	0.02-2.0	Yes	Yes	Yes	Yes	Yes	No	99.9-99.95
Tellurium	Bar	No	No	No	No	Yes	No	Yes	Pieces	99.99-99.9999
Terbium	No	0.025	1.0	No	No	No	No	Yes	Pieces	99.9
Thallium	Rod	No	No	No	No	No	No	No	Granules	99.999
Thulium	No	No	1.0	No	No	Yes	No	Yes	Pieces	99.9-99.99
Tin	Yes	0.25-1.0	1.0-2.0	No	Yes	Yes	No	Yes	Granules	99.9-99.999
Titanium	Yes	0.01-1.0	0.02-1.0	Yes	Yes	Yes	No	No	Yes	99.6-99.995
Tungsten	Yes	0.004-1.0	0.01-1.0	Yes	Yes	Yes	No	Yes	Granules	99.95
Vanadium	Rod	0.05-1.0	1.0-3.0	No	Yes	No	No	No	No	99.9
Ytterbium	No	0.25-0.5	1.0	No	No	Yes	No	Yes	Pieces	99.9
Yttrium	Rod	0.25-1.0	1.0	No	No	Yes	No	Yes	Pieces	99.9
Zinc	Rod	0.1-1.0	0.5-2.0	Yes	Yes	Yes	Yes	Yes	Yes	99.99-99.999
Zirconium	Yes	0.2-1.0	0.1-1.0	Yes	Yes	Yes	No	Yes	Granules	98.0

Evaporation Materials - Oxides

Our product program contains a wide range of Oxides optimized for the special requirements of physical vapor deposition (PVD). Especially our Titanium (TiO2, Ti2O3 and Ti3O5 crystalline) oxides show reduced de-gassing time and a very robust evaporation process.

Besides the common oxides, our portfolio includes special Oxides optimized (e.g. LaTiO3) for high-vacuum coating processes to improve the application of high, medium and low index thin film coatings.

Our special Oxides offer in addition to standard evaporation materials a variety in advantages like better yield, process stability and more design freedom for the optical coating engineer compared to Evaporation Materials currently available in the market.

All standard Evaporation Coils can be supplied on short notice

Name	Formula	Purities
Aluminium Oxide	Al2O3	2N-6N
Antimony Oxide	Sb2O3	2N3-3N
Antimony Tin Oxide	ATO	3N5
Barium Titanate	BaTiO3	2N6-4N
Bismuth Oxide	Bi2O3	2N5-3N
Cerium Oxide	CeO2	CeO2/TREO:2N-3N min; TREO:2N min
Copper Oxide	CuO	3N
Chromium Oxide	Cr2O3	3N
Dysprosium Oxide	Dy2O3	Dy2O3/TREO:2N-3N min; TREO:2N min
Erbium Oxide	Er2O3	ErO3/TREO:2N-3N min; TREO:2N min
Europium Oxide	Eu2O3	Eu2O3/TREO:2N-3N min; TREO:2N min
Gadolinium Oxide	Gd2O3	Gd2O3/TREO:2N-3N min; TREO:2N min
Gallium Oxide	Ga2O3	4N-5N
Germanium Oxide	GeO2	4N-5N
Hafnium Oxide	HfO2	4N
Holmium Oxide	Ho2O3	Ho2O3/TREO:2N-3N min; TREO:2N min
Indium Oxide	In2O3	2N-5N
Indium Tin Oxide	ITO	4N
Iron Oxide	Fe2O3	3N
Iron Oxide	Fe3O4	3N
Lanthanum Oxide	La2O3	La2O3/TREO:2N-3N min; TREO:2N min
Lanthanum Aluminate	LaAlO3	3N
Lead Titanate	PbTiO3	3N
Lead Zirconate	PbZrO3	4N
Lithium Niobate	LiNbO3	4N
Lithium Oxide	LiO	3N
Lithium Tantalate	LiTaO3	4N
Lutetium Iron Oxide	Lu3Fe5O12	3N
Lutetium Oxide	Lu2O3	Lu2O3/TREO:2N-3N min; TREO:2N min
Magnesium Oxide	MgO	2N5-4N
Manganese Oxide	MnO	3N
Magnesium Titanate	MgTiO3	3N
Molybdenum Oxide	MoO3	2N8-3N
Neodymium Oxide	Nd2O3	Nd2O3/TREO:2N-3N min; TREO:2N min
Niobium Pentoxide	Nb2O5	3N-4N
Praseodymium Oxide	Pr6O11	Pr6O11/TREO:2N-3N min; TREO:2N min
Praseodymium Titanate	PrTiO22	3N
Praseodymium Oxide	Pr2O3	Pr2O3/TREO:2N-3N min; TREO:2N min
Samarium Oxide	Sm2O3	Sm2O3/TREO:2N-3N min;TREO:2N min
Scandium Oxide	Sc2O3	Sc2O3/TREO: 4N-5N TREO: 2N5-3N5
Silicon Dioxide	SiO2	4N
Silicon Monoxide	SiO	3N-4N
Strontium Titanate	SrTiO3	3N
Strontium Zirconate	SrZrO3	3N
Tantalum Pentoxide	Ta2O5	3N5-4N
Terbium Oxide	Tb4O7	Tb4O7/TREO:2N5-5N
Tellurium Oxide	TeO2	4N-5N
Thulium Oxide	Tm2O3	Tm2O3/TREO: 4N-5N TREO: 2N5-3N5
Titanium Dioxide	TiO2	3N
Titanium Monoxide	TiO	3N
Titanium Pentoxide	Ti3O5	3N5-4N
Titanium Trioxide	Ti2O3	3N5
Tin Dioxide	SnO2	3N-6N
Tin Monoxide	SnO	3N-6N
Tungsten oxide	WO3	3N
Vanadium Pentoxide	V2O5	3N
Yttrium Aluminum Oxide (YAG)	Y3Al5O12	4N
Ytterbium Oxide	Yb2O3	Yb2O3/TREO: 2N-4N; TREO: 2N min
Yttrium Oxide	Y2O3	Re/TREO: 4N-5N TREO: 2N5-3N5
Zinc Oxide	ZnO	3N
Zinc Aluminum Oxide	ZnO:Al	3N
Zirconium Oxide	ZrO2	3N-4N
Zirconia (Y-Stab)	Zr	3N-4N

Evaporation Materials -Tellurides

Name	Formula	Purities
Antimony Telluride	Sb2Te3	3N-5N
Bismuth Telluride	Bi2Te3	3N-5N
Cadmium Telluride	CdTe	4N-5N5
Gallium Telluride	Ga2Te3	3N-5N
Indium Telluride	In2Te3	3N-5N
Lead Telluride	PbTe	3N-5N
Mercury Telluride	HgTe	3N-5N
Tin Telluride	SnTe	3N-5N
Zinc Telluride	ZnTe	4N-5N

Evaporation Materials - Nitrides

Our Nitrides are offered in the shape of sheets, powders, rods, pellets and granules. Please provide us with full details on the material, purity, dimensions, any special tolerances and the quantity required. We are pleased to provide a tailor made quotation.

Name	Formula	Purities
Aluminum Nitride	AlN	2N-4N
Boron Nitride	BN	2N5
Hafnium Nitride	HfN	2N-4N
Niobium Nitride	NbN	2N5
Silicon Nitride	Si3N4	2N5
Tantalum Nitride	TaN	2N-2N5
Titanium Nitride	TiN	2N

EVOCHEM Materials for R&D

Pure and Ultrapure Metals

Evaporation Materials - Oxides

All standard Evaporation Coils can be supplied on short notice

Evaporation Materials -Tellurides

Evaporation Materials - Nitrides